TREX Series - Wafer
surface contamination monitoring
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Incoming Wafers |
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Si |
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Ge |
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III-V (GaAs, InP) |
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Sapphire |
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Single and multi-crystalline silicon substrates for PV. |
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Cleaning |
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Diffusion |
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Etch |
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CMP |
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Process Tool "finger printing" |
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TVD - automated vapor phase decomposition (VPD) prep tool for wafer surface contamination monitoring |
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Thermal oxides |
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Native oxides |
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Low- k, nitride, and TEOS films |
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S-MAT - Film thickness, density, surface roughness,
interface roughness, composition, crystal orientation and phase identification. |
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CIGS and CdTe films for PV |
Phase change memory films (GST) |
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Ultra Thin ALD films |
Gate dielectrics |
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Metal films |
SAW and BAW devices. |
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High-k dielectrics |
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Multi-layer film stacks |
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Silicides |
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Ferroelectrics |
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Low-k dielectrics |
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Porous Low K |
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applications
