Technos International is located in Tempe
Arizona as the US headquarters of our parent company Technos
Co, Ltd (http:www.technos.co.jp).
Technos International is dedicated to sales and customer
support of Technos' line of products. We have support
offices in Phoenix, AZ, CA Silicon Valley, Portland,OR, Austin and Dallas, TX, the United Kingdom, France
and Israel. Our primary focus is the semiconductor
and flat panel industries. Recently Technos has developed specific X-ray based metrology solutions for photovoltaics applications through close cooperation with customers. We hire only industry qualified and knowledgeable
sales and customer service staff dedicated to the advancement
of our industry through innovation and quality.
Pioneer and world leader in applying
X-ray technology; Technos helps the semiconductor industry
solve manufacturing challenges. With over 20 years of technical
experience, Technos has gained valuable expertise in analytical
X-ray applications for the semiconductor industry.
A company characteristic is to initiate joint development
programs with leading-edge IC manufacturers, in order
to design and manufacture systems that will fulfill
emerging needs of users.
The S-MAT (Semiconductor Materials Analysis Tool)
which measures film thickness, density, composition,
and
roughness on blanket and product wafers, and the TREX 616, the world's first 400-mm
wafer contamination surface analyzer developed for
the
Super Silicone Institute (SSI), are examples of these
collaborations.
Market Leader
for Trace Metal Contamination Monitoring Tools |
The TREX Series TXRF
(Total-reflection X-Ray Fluorescence) has become the
standard
used by labs and fabs in virtually every major wafer
manufacturer and IC manufacturer world wide. TREX equipment
is used to monitor
trace
element contamination
on wafers. With over 355 TREX systems shipped since its
introduction in 1989, Technos is the worldwide market
leader for Total Reflection X-ray Fluorescence Wafer
Surface
Analyzers. Technos has been steadily increasing its world
wide market share due to our ability to satisfy customer
requirements through product innovation and our willingness
to set and meet the highest standards of quality production.
With the need to increase surface analysis sensitivity while
keeping easy operation and a fully automated process, Technos
introduced its first generation Vapor-Phase Decomposition systems in 2002.
Consistently, Technos actively works with customers to develop new
capabilities needed to meet future customer requirements.
X-ray Based Solutions for Advanced
Thin-Film Metrology |
Technos S-MAT Series was launched in 1996. Today, the S-MAT can combine several X-ray techniques (XRR, XRF, XRD) in one single tool and allows for measurement of blanket and product wafers with its small spot and pattern recognition capabilities.
Technos specialty compared to comparable systems on the market is the high sensitivity of its X-ray optics which translates into excellent data quality and high throughput especially for ultra-thin films.
The S-MAT systems are used in a demanding production environment and for developing new applications in R&D.
Product lines
for In-lab and In-fab |
Technos offers a range of systems used at various steps
of the semiconductor wafer's manufacturing process. Specific
configurations are available for systems used in the R&D
environment and for systems meeting the critical requirements
for in-fab metrology. The same software platform is used
on all systems. This allows easy transfer of processes
from R&D to the lab. Technos products' range include:
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TREX Series,
Trace element contamination control monitoring
tools. |
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TREX6000TVD,
Integrated TXRF and sample preparation tool. |
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TVD 910 Automated
VPD tool for sample preparation to enhance detection
limits for TXRF or ICPMS analysis of wafer contaminants.
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S-MAT Series,
Semiconductor metrology tools (XRR/XRF/XRD) enabling layer thickness,
density, composition and roughness measurements
for dielectric and metal films. Phase ID and crystal orientation by X-ray
Diffraction can be added capabilities.
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S-MATPV,
XRF metrology system developed specifically to meet the needs of the photovoltaics industry.
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applications
