The S-MAT 2000 is the evolution of the S-MAT 200. This tool offers greater automation, S2/S8 and CE certification and enormous flexibility is configuring a tool to address 200mm production needs.

The S-MAT 2000 is a metrology tool designed to accurately measure thin films, without standards. Advanced x-ray reflectivity (XRR) measure single and multi-layers stacks with ease and a repeatability of 0.1%. Designed as a daily monitor the SMAT 2000 can rapidly and reliably handle 200mm production requirements.

Measure thickness and density

Measure metal films:
Ti, Cr, Al, Co, Pt, Cu, Ir and others

Measure Nitride films:
TiN (PVD or MOCVD and organic CVD), SiN, WN, and others

Measure Oxide Films:
SiO2, PZT, IrO2 and others

Measure Silicide Films:
WSi, TiSi2, and others

Measure Multilayer Stacks:
Ti/TiN, SOI