Thickness and Composition Measurement for Thin Film with combined X-Ray Technique 201K - PDF
Trace metallic contamination analysis on the wafer edge and bevel by TXRF and VPD-TXRF 106K - PDF
Thickness and Density Measurement for New Materials with combined X-Ray Technique 119K - PDF
A Grazing Incidence X-Ray Flourescence Analysis of the Composition of (Ba, Sr) TiO3 (BST), AND SrRuO3 (SRO) Stacked Films 201K - PDF
Thickness Monitoring of Opaque Films by X-Ray Interference Method 63K - PDF
GST Thin Film Metrology with XRR and XRF 23K - PDF
BaSrTi_films 119K - PDF
A New Application of Vapor Phase Decomposition for Thermal Oxides 87K - PDF
Advanced TXRF Analysis: Background Reduction when Measuring High-k Materials and Mapping Metallic Contamination. 155K - PDF
Characterization of SiGe film Thickness and Composition by X-ray Methods 17K - PDF
XRF-based metrology for sub-5Å capping layer films in high-k, metal gate stacks 41K - PDF
Technos automated vapor phase decomposition system
July 14 - 16th 2009
Semicon West and IntersolarSan Francisco, CA, USA Booth #1934 - South Hall
Thin Film Metrology: XENITH 1200 Series | S-MAT 2000 Series | S-MAT 2300 Series|
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