The
TREX 610 series is a high-performance contamination monitoring
tool, that utilizes powerfulsealed-tube x-ray sources for extended elemental
range.
The sealed tube design offers
low Cost of Ownership (CoO)
and excellent detection limits for a broad elemental
range.
The TREX 610 features automated wafer handling and a patented
alignment system,
that enables mapping of surface and sub-surface contaminants
and semi-quantitative analysis on the wafer backside.
applications
