| The TREX
620 series is an in-fab,
high-uptime, low maintenance contamination
monitoring tool, that utilizes one, two, or three
sealed x-ray tubes and high-efficiency monochrome crystal(s)
that
enable detection in the low atoms/cm².
The design incorporates separate and optimized optical
paths for each excitation source, automated wafer handling,
notch aligner and a patented alignment system, that
enables mapping of surface and sub-surface contaminants
and semi-quantitative analysis on the wafer backside.
A small footprint, GEM/SECS software and its ease of
use make the TREX 620 ideal for any fab. |
applications
