| The TREX
630 series is for 200mm
or 300mm wafers and may be configured for lab or in-line
use. This system's high-uptime, low
maintenance configuration has already been selected by
a large majority of the 300mm fabs world wide. This
series may be
configured a number of ways, from a powerful
single sealed tube
system to a
powerful quad-source sealed tube configuration.
The design incorporates separate and optimized optical
paths for each excitation source, automated wafer
handling, notch aligner
and a patented alignment system, that enables mapping
of surface and sub-surface contaminants and semi-quantitative
analysis on the wafer backside.
A small footprint, GEM/SECS software,
avilable Rapid Scan technology, and its ease of
use make the TREX 630 ideal for any fab or lab. |
applications
