The Xenith 1200 series is a metrology tool designed to quickly and accurately measure thin films.
It is designed to address industry needs at the 90nm node and beyond.
The Xenith will handle with ease and precision single and multi layer stacks and next generation ultra thin films to 5A.
The Xenith offers advanced capabilities that meet thin film process control requirements.
The parameters that can be measured by the Xenith are layer thickness and composition.
Applications include:
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applications
